Fabrication of Semiconductor Devices

ABSTRACT

A method for fabrication of a semiconductor device, the semiconductor device having a plurality of epitaxial layers on a substrate. The plurality of epitaxial layers include an active region in which light is able to be generated. The method comprises applying at least one first ohmic contact layer to a front surface of the epitaxial layer, the first ohmic contact layer also acting as a reflector. The substrate is then remove from a rear surface of the epitaxial layers. The rear surface is then textured.

FIELD OF THE INVENTION

The present invention relates to the fabrication of semiconductordevices and refers particularly, though not exclusively, to thefabrication of semiconductor light emitting diodes (LEDs) with surfacetexturing for improved light output.

DEFINITIONS

Throughout this specification optoelectronic device includes lightemitting diodes (“LEDs”) and laser diodes.

Throughout this specification reference to GaN devices such as, forexample, GaN LEDs, is to be taken as including a reference to allsemiconductor devices made of GaN-related materials, including, but notlimited to, GaN, AlGaN, InGaN, AlGaInN, and so forth.

BACKGROUND TO THE INVENTION

The majority of current semiconductor devices are made fromsemiconductor materials based on silicon (Si), gallium arsenide (GaAs),and indium phosphide (InP). Compared to such electronic andoptoelectronic devices, GaN devices have many advantages. The majorintrinsic advantages that GaN has are summarised in Table 1:

TABLE 1 Band Gap BFOM (eV)/ (power Maximum Semi- Mobility μ wavelengthtransistor Temperature conductor (cm²/Vs) (nm) merit) (C.) Si 1300 1.1/1127 1.0 300 GaAs 5000 1.4/886 9.6 300 GaN 1500 3.4/360 24.6 700BFOM; Baliga's figure of merit for power transistor performance Ashorter wavelength corresponds to a higher DVD/CD capacity.

From Table 1, it can be seen that GaN has the highest band gap (3.4 eV)among the given semiconductors. Thus, it is called a wide band gapsemiconductor. Consequently, electronic devices made of GaN operate atmuch higher power than Si and GaAs and InP devices. Green, blue, andultraviolet (UV) and white light emitting diodes (LEDs) can be made fromGaN wafers.

For semiconductor lasers, GaN lasers have a relatively short wavelength.If such lasers are used for optical data storage, the shorter wavelengthmay lead to a higher capacity. GaAs lasers are used for the manufactureof CD-ROMs with a capacity of about 670 MB/disk. AlGaInP lasers (alsobased on GaAs) are used for the latest DVD players with a capacity ofabout 4.7 GB/disk. GaN lasers in the next-generation DVD players mayhave a capacity of 26 GB/disk.

GaN devices are made from GaN wafers that are typically multipleGaN-related epitaxial layers deposited on a sapphire substrate. Thesapphire substrate is usually two inches in diameter and acts as thegrowth template for the epitaxial layers. Due to lattice mismatchbetween GaN-related materials (epitaxial films) and sapphire, defectsare generated in the epitaxial layers. Such defects cause seriousproblems for GaN lasers and transistors and, to a lesser extent, for GaNLEDs.

There are two major methods of growing epitaxial wafers: molecular beamepitaxy (MBE), and metal organic chemical vapour deposition (MOCVD).Both are widely used.

Conventional LED fabrication processes usually include the major steps:photolithography, etching, dielectric film deposition, metallization,bond pad formation, wafer inspection/testing, wafer thinning, waferdicing, chip bonding to packages, wire bonding and reliability testing.

Once the processes for making LEDs are completed at the full waferscale, it is then necessary to break the wafer into individual LED chipsor dice. For GaN wafers grown on sapphire substrates, this “dicing”operation is a major problem as sapphire is very hard. The sapphirefirst has to be thinned uniformly from about 400 microns to about 100microns. The thinned wafer is then diced by diamond scriber, sawed by adiamond saw or by laser grooving, followed by scribing with diamondscribers. Scribing of the sapphire may be by use of an ultra violet(“UV”) laser, but care must be taken to ensure the laser does not damagethe GaN device. Such processes limit throughput, cause yield problemsand consume expensive diamond scribers/saws.

Known LED chips grown on sapphire substrates require two wire bonds ontop of the chip. This is necessary because sapphire is an electricalinsulator and current conduction through the 100-micron thickness is notpossible. Since each wire bond pad takes about 10-15% of the wafer area,the second wire bond reduces the number of chips per wafer by about10-15% as compared to single-wire bond LEDs grown on conductingsubstrates. Almost all non-GaN LEDs are grown on conducting substratesand use one wire bond. For packaging companies, two wire bonding reducespackaging yield, requires modification of one-wire bonding processes,reduces the useful area of the chip, and complicates the wire bondingprocess.

Sapphire is not a good thermal conductor. For example, its thermalconductivity at 300K (room temperature) is 40 W/Km. This is much smallerthan copper's thermal conductivity of 380 W/Km. If the LED chip isbonded to its package at the sapphire interface, the heat generated inthe active region of the device must flow through 3 to 4 microns of GaNand 100 microns of sapphire to reach the package/heat sink. For GaN LEDson sapphire, the active region where light is generated is about 3 to 4micron from the sapphire substrate. As a consequence, the chip will runhot affecting both performance and reliability.

In general, the external quantum efficiency of GaN LEDs is less than theinternal quantum efficiency. If no special treatment is carried out onthe chip to extract more light, the external quantum efficiency is a fewpercent, while the internal quantum efficiency can be as high as 99% (1.Schnitzer and E. Yablonovitch, C. Caneau, T. J. Gmitter, and A. Schere,Applied Physics Letters, Volume 63, page 2174, 18 Oct. 1993). This largediscrepancy between the two quantum efficiencies is also true to otherLEDs. Its origin is due to the light extraction efficiency of mostconventional LEDs being limited by the total internal reflection of thegenerated light in the active region of the LED, which occurs at thesemiconductor-air interface. This is due to the large difference in therefractive index between the semiconductor and air.

For GaN devices, the critical angle to enable the light generated in theactive region to be able to escape is about 230. Because the lightemission from the active region of a LED is directionally isotropic, andthe light can only escape from the chip if the angle of incidence to thechip wall (often the front surface of the LED chip) is less than thecritical angle, a small fraction of light generated in the active regionof the LED can escape to the surrounding environment (e.g. air). Theescaping light is generally in a cone of light. FIG. 1 (not to scale)illustrates this escape cone concept. Therefore, for a conventional LED,the external quantum efficiency is limited to a few percent.

It is known that surface texturing can increase the light extractionefficiency significantly (e.g., 1. Schnitzer and E. Yablonovitch, C.Caneau, T. J. Gmitter, and A. Schere, Applied Physics Letters, Volume63, page 2174, 18 Oct. 1993), and it has been used in the fabrication ofLEDs such as, for example, AlGaInP-based LEDs. In order to increaselight-extraction efficiency from LEDs, it is very important that thephotons generated within the LEDs experience multiple opportunities tofind the escape cone or the surface is so modified that the generatedlight falls into new escape cones, as shown in the illustration of FIG.2, which is a figure from Journal of Applied Physics, Volume 93, page9383, 2003.

It has been suggested to improve the light output of an InGaN-based LEDby using a microroughened p-GaN surface (i.e. the normal top or frontsurface), with metal clusters being used as a wet etching mask (Journalof Applied Physics 93, page 9383, 2003). The light-output efficiency ofan LED structure with a microroughened surface was significantlyincreased compared to that of a conventional LED structure. For an LEDwith a p-GaN top surface that was microroughened, the angularrandomization of photons can be achieved by surface scattering from themicroroughened top surface of the LED. Thus, the microroughened surfacestructure can improve the probability of photons escaping to outside theLED, resulting in an increase in the light output power of the LED.

The technique of surface texturing, however, has only been applied tothe front surface of the LED. The technique has difficulties in devicefabrication, especially for GaN LEDs, where the layers above the activeregion are quite thin (about 300 nm), and etching of GaN is difficult.To texture the surface, patterns of depths of a few hundred nanometersare often generated by dry etching or wet etching on the surface. Thisposes considerable risk of possible damage to the active region, andthus may cause a significant deterioration in the performance of thedevice.

SUMMARY OF THE INVENTION

In accordance with a preferred form there is provided a method forfabrication of a semiconductor device, the semiconductor device having aplurality of epitaxial layers on a substrate, the plurality of epitaxiallayers including an active region in which light is able to begenerated; the method comprising:

-   (a) applying at least one first ohmic contact layer to a front    surface of the epitaxial layer; the first ohmic contact layer also    acting as a reflector;-   (b) removing the substrate from a rear surface of the epitaxial    layers; and-   (c) texturing the rear surface.

Before the substrate is removed, a seed layer of a thermally conductivemetal may be applied to the ohmic contact layer, and a relatively thicklayer of the thermally conductive metal may be electroplated on the seedlayer. The front surface may be coated with an adhesion layer, or amultiple layer stack, prior to application of the seed layer.

The seed layer may be patterned with photoresist patterns before theelectroplating step (b), and the electroplating of the relatively thicklayer may be between the photoresist patterns. The photoresist patternsmay be of a height in the range 3 to 500 micrometers, and may have athickness in the range 3 to 500 micrometers. The photoresist patternsmay have a spacing in the range of 200 to 2,000 microns.

Before removing the substrate annealing may be performed to improveadhesion

The seed layer may be electroplated without patterning, patterning beingperformed subsequently. Patterning may be by photoresist patterning andthen wet etching; or by laser beam micro-machining of the relativelythick layer. The relatively thick layer may be of a height no greaterthat the photoresist height, or may be of a height greater than thephotoresist and is subsequently thinned. Thinning may be by polishing orwet etching.

Step (c), i.e. the texturing of the rear surface, may be by standardpatterning methods. For example, it may be by patterning the exposedrear surface and then etching. Etching may be by one or more of: dryetching, wet etching, photochemical etching, laser etching, or othersuitable methods. The texturing may also be by photolithography followedby deposition of a layer on the exposed rear surface and then lift-off.

As taught by Huh et al (J. Appl. Phys. 93, page 9383, 2003), texturingmay also be by depositing a thin metal film on the rear surface, andthen rapid thermal annealing of the metal to form a cluster of metaldrops which is then used as an etching mask for the surface texturing.

The shape and dimensions of the surface texturing may be varied asrequired or desired, depending on the design and/or process methods.

After removing the substrate, the rear surface may be etched (with orwithout patterning), and then the rear surface textured.

Alternatively, the surface texturing may be on a layer (or a stack ofmultiple layers) added to the rear surface after the substrate isremoved.

After step (c), or between steps (b) and (c), there may be included anextra step of forming a second ohmic contact layer on the rear surface,the second ohmic contact layer being selected from the group consistingof: opaque, transparent, and semi-transparent. The second ohmic contactlayer may be one of blank and patterned. Bonding pads may be formed onthe second ohmic contact layer.

The exposed rear surface may be cleaned and etched before the secondohmic contact layer is deposited. The second ohmic contact layer may notcover the whole area of the rear surface. If the second ohmic contactlayer covers large portion of the rear surface, step (c) may be formeddirectly on the second ohmic contact. In this way the patterned secondohmic contact layer serves as the textured surface.

The substrate may be patterned before the deposition of the epitaxiallayers on the substrate. Therefore, after the removal of the substrate,the rear surface is already patterned and thus no subsequent rearsurface texturing is required.

It is also possible to pattern or texture the layers below the activeregion during the deposition of the plurality of epitaxial layers. Inthis way the patterns are already in the layered structure before thesubstrate is removed, although the texture is not at the rear surface.Such patterning may improve the extraction efficiency of the LED afterthe substrate is removed.

After forming the second ohmic contact layer there may be included thetesting of the semiconductor devices, and the step of separation intoindividual devices.

The semiconductor devices may be fabricated without one or more selectedfrom the group consisting of: lapping, polishing and dicing.

The first ohmic contact may be on p-type layers of the epitaxial layers;and the second ohmic contact layer may be formed on n-type layers of theexpitaxial layers.

After step (c), dielectric film(s) may be deposited on the epitaxiallayers and openings cut in the dielectric films and second ohmic contactlayer, and bond pads deposited on the epitaxial layers. Step (c) may beperformed in the deposited dielectric film(s), instead of the rearsurface.

After step (a), electroplating of a thermally conductive metal on theepitaxial layers may be performed. The thermally conductive metal may becopper, and the epitaxial layers may be multiple GaN-related layers.

In a further form there is provided a semiconductor device comprisingepitaxial layers, first ohmic contact layers on a front surface of theepitaxial layer and providing a reflective surface, and a second ohmiccontact layer on a rear surface of the epitaxial layers; the rearsurface being surface textured.

A relatively thick layer of a thermally conductive metal may be providedon the first ohmic contact layer, there being a layer on the first ohmiccontact layer between the first ohmic contact layer and the relativelythick layer. A seed layer of the thermally conductive metal may beapplied to the adhesive layer. The relatively thick layer may be atleast 20 micrometers thick. The layer may be an adhesive layer or astack of multiple layers.

The second ohmic contact layer may be a thin layer in the range of from3 to 500 nanometers; and may be selected from the group consisting of:opaque, transparent, and semi-transparent. The second ohmic layer mayinclude bonding pads.

The thermally conductive metal may be copper, and the epitaxial layersmay be multiple GaN-related epitaxial layers.

The semiconductor device may be a light emitting device, or a transistordevice.

The second ohmic contact layer may be blank or patterned.

BRIEF DESCRIPTION OF THE DRAWINGS

In order that the invention may be better understood and readily putinto practical effect there shall now be described by way ofnon-limitative example only a preferred embodiment of the presentinvention, the description being with reference to the accompanyingillustrative (and not to scale) drawings in which:

FIG. 1 is a schematic representation of light escaping from asemiconductor device;

FIG. 2 is an illustration of photons generated within the semiconductordevice of FIG. 1 being given multiple opportunities to find the escapecone;

FIG. 3 is a schematic representation of a semiconductor device at afirst stage in the fabrication process;

FIG. 4 is a schematic representation of the semiconductor device of FIG.3 at a second stage in the fabrication process;

FIG. 5 is a schematic representation of the semiconductor device of FIG.3 at a third stage in the fabrication process;

FIG. 6 is a schematic representation of the semiconductor device of FIG.3 at a fourth stage in the fabrication process;

FIG. 7 is a schematic representation of the semiconductor device of FIG.3 at a fifth stage in the fabrication process;

FIG. 8 is a side view of the semiconductor device of FIG. 7;

FIG. 9 is an underneath view of a single die produced from thesemiconductor device of FIGS. 7 and 8;

FIG. 10 is a schematic representation of the semiconductor device ofFIG. 3 at a sixth stage in the fabrication process;

FIG. 11 is a side view of the semiconductor device of FIG. 10; and

FIG. 12 is a flow chart of the process.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

For the following description, the reference numbers in brackets referto the process steps in FIG. 12. FIG. 12 is illustrative only and doesnot include all process steps that may be undertaken in a commercialsituation, those steps not required for a full understanding of theinvention having been deleted for the sake of simplifying thedescription of the process.

To refer to FIG. 3, there is shown the first step in the process—themetallization on the p-type surface of the wafer 10.

The wafer 10 is an epitaxial wafer with a substrate 12 and a stack ofmultiple epitaxial layers 14 on it. The substrate 12 can be, forexample, sapphire, GaAs, InP, Si, and so forth. Henceforth a GaN samplehaving GaN layer(s) 14 on sapphire substrate 12 will be used as anexample. The epitaxial layers 14 (often called epilayers) are a stack ofmultiple layers, and the lower surface 16 (which is grown first on thesubstrate) is usually n-type layers and the upper part 18 is oftenp-type layers. An active region is often sandwiched between 16 and 18,and is often made of quantum wells (QWs) or multiple quantum wells(MQWs) that are often not intentionally doped. A quantum well is usuallya stack of at least three layers. For example, for GaN LEDs, themultiple quantum wells are often GaN/InGaN/GaN or AlGaN/GaN/AlGaNmultiple layers.

On the front surface of GaN layers 14 is an ohmic contact layer 20having multiple metal layers. The ohmic contact layer 20 also acts as areflector or mirror at the interface with the epitaxial layers 14.Therefore, light generated in the active region in epitaxial layers 14is reflected towards the rear surface 16 of epitaxial layers—the rearsurface 16 being that which interfaces with substrate 12. To ohmiccontact layer 20 is added an adhesion layer 22, and a thin copper seedlayer 24 (FIG. 4) (step 87) of a thermally conductive metal such as, forexample, copper. The thermally conductive metal is preferably alsoelectrically conductive. The stack of adhesion layers may be annealedafter formation.

The ohmic layer 20 may be a stack of multiple layers deposited andannealed on the semiconductor surface. It may not be part of theoriginal wafer. For GaN, GaAs, and InP devices, the epitaxial waferoften contains an active region that is sandwiched between n-type andp-type semiconductors. In most cases the top layer is p-type. Forsilicon devices, epitaxial layers may not be used, but just the wafer.

As shown in FIG. 5, using standard photolithography (88), the thincopper seed layer 24 is patterned with relatively thick photoresists 26.The photoresist patterns 26 are preferably of a height in the range of 3to 500 micrometers, preferably 15 to 500 micrometers; and with athickness of about 3 to 500 micrometers. They are preferably separatedfrom each other by a spacing in the range of 200 to 2,000 microns,preferably 300 microns, depending on the design of the final chips. Theactually pattern depends on device design.

A patterned layer 28 of copper is then electroplated onto layer 24 (90)between photoresists 26 to form a heat sink that forms a part of the newsubstrate (FIG. 6). The copper layer 28 is preferably of a height nogreater than that of the photoresists 26 and is therefore of the same orlesser height than the photoresists 26. However, the copper layer 28 maybe of a height greater than that of the photoresists 26. In such a case,the copper layer 28 may be subsequently thinned to be of a height nogreater than that of the photoresists 26. Thinning may be by polishingor wet etching. The photoresists 26 may or may not be removed after thecopper plating. Removal may be by a standard and known method such as,for example, rinsing in the resist stripper solution, or by plasmaaching.

Depending on the device design, processing of the epitaxial layers 14follows using standard processing techniques such as, for example,cleaning (80), lithography (81), etching (82), device isolation (83),passivation, metallization (86), thermal processing (86), and so forth.(FIG. 4). The wafer 10 is then annealed (87) to improve adhesion.

The epitaxial layer 14 is usually made of n-type layers 16 on theoriginal substrate 12; and p-type layers on the original top surface 18which is now covered with the ohmic contact layer 20, adhesion layer 22,copper seed layer 24, and the electroplated thick copper layer 28.

In FIG. 7, the original substrate layer 12 is then removed (91) using,for example, the method of Kelly [M. K. Kelly, O. Ambacher, R. Dimitrov,R. Handschuh, and M. Stutzmann, phys. stat. sol. (a) 159, R3 (1997)].The substrate may also be removed by polishing or etching. If asacrificial layer is grown between the substrate and the epitaxiallayers, after growth the substrate can be separated from the epitaxiallayers with separation being automatic, or by mechanical force.

Known preliminary processes may then be performed. These may be, forexample, photolithography (92, 93), dry etching (94) surface texturingof the rear surface 34 (95) and photolithography (96). The surfacetexturing (95) forms a textured rear surface 34.

FIG. 7 is the penultimate step. After the removal of the substrate 12,surface texturing is carried out on the now-exposed rear surface 14thereby forming the surface patterns 34. The center part 35 of the rearsurface is also etched for subsequent deposition of the second ohmiccontact 30. The centre area 35 does not have to be etched, if desired orrequired. Bonding pads 32 are also added to the second ohmic contact 30.The second ohmic contact layer 30 is preferably a thin layer, or a stackof multiple metal layers and may be in the range of 3 to 50 nm thick.

Annealing (98) may follow the deposition of ohmic contact layer 30, orafter the deposition of bond pad 32.

The chips/dies are then tested (99) by known and standard methods. Thechips/dies can then be separated (100) (FIG. 11) into individualdevices/chips without lapping/polishing the substrate, and withoutdicing. Packaging follows by standard and known methods.

The front surface of the epitaxial layer 14 is preferably in the rangeof about 0.1 to 2.0 microns, preferably about 0.3 microns, from theactive region. For silicon-based semiconductors, the top surface of thesemiconductor is preferably in the range 0.1 to 2.0 microns, preferablyabout 0.3 microns, from the device layer. As the active layer/devicelayer in this configuration is close to a relatively thick copper pad28, the rate of heat removal is improved.

Additionally or alternatively, the relatively thick layer 28 may be usedto provide mechanical support for the chip. It may also be used toprovide a path for heat removal from the active region/device layer, andmay also be used for electrical connection.

The plating step is performed at the wafer level (i.e., before thedicing operation) and may be for several wafers at the one time.

The fabrication of GaN laser diodes is similar to the fabrication of GaNLEDs, but more steps may be involved. One difference is that GaN laserdiodes require mirror formation during the fabrication. Using sapphireas the substrate compared to the method without sapphire as thesubstrate, the mirror formation is much more difficult and the qualityof the mirror is generally worse.

The first ohmic contact layer 20, being metal and relatively smooth, isquite shiny and therefore highly reflective of light. As such the firstohmic contact layer 20, at its junction with the epitaxial layers 14,also is a reflective surface, or mirror, to improve light output. Lightoutput is through textured surface 34.

In this way the textured surface 34 is fabricated on the rear surfacebeing the surface to which the sapphire was previously attached, and thereflective layer is fabricated on the front surface of the relativelysmooth epitaxial layers. Light emission is through the rear, texturedsurface 34, and reflection is at the top or front surface. This is thereverse of normal. In this way the original top layer 18 may be of athickness such as that of an ordinary LED, for example, 0.1 μm, and thedepth of the texturing of surface 34 may be within a wide range such as,for example, from 0.01 μm to 2 μm.

If the surface texturing is on the rear surface and is formed after thesubstrate is removed, the problems of the prior art may be largelyavoided, as the total thickness of the layers between the sapphiresubstrate and the active region often exceeds 3 microns (3000 nm), thusthe formation of the surface patterns should not noticeably affect theactive region.

For the surface texturing to have significant effect on light extractionefficiency, the quality of the reflection mirror is important, as themirrors increase the opportunities for the light to find the escapecone. If the mirror is placed at the front surface, the substrate ifremoved, and then surface texturing is done on the newly-exposed rearsurface, the reflection of the light is significantly improved, as thedistance between the front mirror and the rear surface is relativelylow—normally of the order of a few microns. If the substrate is notremoved, as in most cases, mirrors are often formed on the back of thesubstrate, while surface texturing is done on the front surface, thedistance between them is thus hundreds of microns. When light travels alarge distance between the front and back, there is a high loss of lightby absorption.

Although reference is made to copper, any other platable material may beused provided it is electrically and/or heat conductive, or provides themechanical support for the semiconductor device.

The texturing of the rear surface may be by standard patterning methods.For example, it may be by patterning the exposed rear surface and thenetching. Etching may be by one or more of: dry etching, wet etching,photochemical etching, laser etching, or other suitable methods. Thetexturing may also be by photolithography followed by deposition of alayer on the exposed rear surface and then lift-off.

As taught by Huh et al, (J. Appl. Phys. 93, page 9383, 2003), texturingmay also be by depositing a thin metal film on the rear surface, andthen rapid thermal annealing of the metal to form a cluster of metaldrops which is then used as an etching mask for the surface texturing.Texturing may be performed on the deposited dielectric film(s), insteadof the rear surface.

If the second ohmic contact layer covers large portion of the rearsurface, the texturing step may be formed directly on the second ohmiccontact. In this way the patterned second ohmic contact layer serves asthe textured surface.

The substrate may be patterned before the deposition of the epitaxiallayers on the substrate. Therefore, after the removal of the substrate,the rear surface is already patterned and thus no subsequent rearsurface texturing is required.

It is also possible to pattern or texture the layers below the activeregion during the deposition of the plurality of epitaxial layers. Inthis way the patterns are already in the layered structure before thesubstrate is removed, although the texture is not at the rear surface.Such patterning may improve the extraction efficiency of the LED afterthe substrate is removed.

Whilst there has been described in the foregoing description a preferredform of the present invention, it will be understood by those skilled inthe technology that many variations or modifications in design,construction or operation may be made without departing from the presentinvention.

1. A method for fabrication of a semiconductor device, the semiconductordevice having a plurality of epitaxial layers on a substrate, theplurality of epitaxial layers including an active region in which lightis able to be generated, the method comprising: (a) applying at leastone first ohmic contact layer to a front surface of the epitaxial layer,the first ohmic contact layer also acting as a reflector; (b) removingthe substrate from a rear surface of the epitaxial layers; and (c)texturing the rear surface.
 2. A method as claimed in claim 1, whereinbefore the substrate is removed a relatively thick layer of thethermally conductive metal is electroplated on the reflector layer.
 3. Amethod as claimed in claim 1, wherein before the substrate is removed, aseed layer of a thermally conductive metal is applied to the ohmiccontact layer, and a relatively thick layer of the thermally conductivemetal is electroplated on the seed layer.
 4. A method as claimed inclaim 3, wherein the front surface is coated prior to application of theseed layer, the coating being one or more of: an adhesion layer, and amultiple layer stack.
 5. A method as claimed in claim 3, wherein apatterned layer is added to the seed layer before the electroplatingstep, and the electroplating of the relatively thick layer is betweenthe patterns.
 6. A method as claimed in claim 5, wherein the patternedlayer comprises photoresist patterns.
 7. A method as claimed in claim 3,wherein the seed layer is patterned before the electroplating step, andthe electroplating of the relatively thick layer is between thepatterns.
 8. A method as claimed in claim 7, wherein the pattern on theseed layer comprises photoresist patterns. 9-53. (canceled)
 54. A methodas claimed in claim 3, wherein the seed layer is electroplated withoutpatterning, patterning before performed subsequently, patterning beingby one selected from the group consisting of: photoresist patterning andthen wet etching, and laser beam micro-machining of the relatively thicklayer.
 55. A method as claimed in claim 1, wherein before removing thesubstrate annealing is performed to improve adhesion.
 56. A method asclaimed in claim 2, wherein the relatively thick layer is of a height nogreater that the photoresist height.
 57. A method as claimed in claim 2,wherein the relatively thick layer of thermally conductive metal iselectroplated to a height greater than the photoresist and issubsequently thinned; thinning being by polishing or wet etching.
 58. Amethod as claimed in claim 1, wherein the texturing step (c) is by atleast one method selected from the group consisting of: (a) patterningthe rear surface and then etching, (b) photolithography followed bydeposition of a layer on the rear surface and then lift-off, and (c) bydepositing a thin metal film on the rear surface and then rapid thermalannealing of the metal to form a cluster of metal drops that is used asan etching mask for the texturing.
 59. A method as claimed in claim 58,wherein etching is by one or more of the methods selected from the groupconsisting of: dry etching, wet etching, photochemical etching, andlaser etching.
 60. A method as claimed in claim 1, wherein the texturingis of a shape and dimensions able to be varied.
 61. A method as claimedin claim 1, wherein after removing the substrate in step (b), the rearsurface is etched and the rear surface is then textured.
 62. A method asclaimed in claim 1, wherein after the substrate is removed in step (b),at least one layer added to the rear surface and the at least one layeris textured.
 63. A method as claimed in claim 1, wherein there isincluded an extra step of forming a second ohmic contact layer on therear surface, the second ohmic contact layer being selected from thegroup consisting of: opaque, transparent, and semi-transparent, theextra step being performed at one of: after step (c), and between steps(b) and (c).
 64. A method as claimed in claim 63, wherein the secondohmic contact layer is one of blank and patterned, and bonding pads areformed on the second ohmic contact layer.
 65. A method as claimed inclaim 2, wherein after the relatively thick layer is applied, ohmiccontact formation and subsequent process steps are carried out, thesubsequent process steps including deposition of wire bond pads.
 66. Amethod as claimed in claim 63, wherein the exposed second surface iscleaned and etched before the second ohmic contact layer is deposited,and the second ohmic contact layer does not cover the whole area of therear surface.
 67. A method as claimed in claim 66, wherein the secondohmic contact layer covers large portion of the rear surface, and step(c) is performed directly on the second ohmic contact layer and thesecond ohmic contact layer is the textured surface.
 68. A method asclaimed in claim 63, wherein there is included the step of separationinto individual devices.
 69. A method as claimed in claim 1, wherein thesemiconductor devices are fabricated without one or more selected fromthe group consisting of: lapping, polishing and dicing.
 70. A method asclaimed in claim 1, wherein the at least one first ohmic contact layeris on p-type layers of the epitaxial layers, and the second ohmiccontact layer is formed on n-type layers of the epitaxial layers.
 71. Amethod as claimed in claim 1, wherein after step (c), dielectric filmsare deposited on the epitaxial layers and openings are cut in thedielectric films and second ohmic contact layer, and bond pads depositedon the epitaxial layers.
 72. A method as claimed in claim 1, whereinafter step (c), electroplating of a thermally conductive metal on theepitaxial layers is performed.
 73. A method as claimed in claim 72,wherein the thermally conductive metal comprises copper and theepitaxial layers comprise multiple GaN-related layers.
 74. A method asclaimed in 73, wherein step (c) is performed in the deposited dielectricfilm(s) instead of the rear surface.
 75. A method for fabrication of asemiconductor device, the semiconductor device having a plurality ofepitaxial layers on a substrate, the plurality of epitaxial layersincluding an active region in which light is able to be generated, themethod comprising: (a) patterning the substrate prior to the depositionof the plurality of epitaxial layers on the substrate; (b) applying atleast one first ohmic contact layer to a front surface of the pluralityof epitaxial layers, the first ohmic contact layer also acting as areflector; and (c) removing the substrate from a rear surface of theepitaxial layers such that after the removal of the substrate, the rearsurface is already patterned.
 76. A method as claimed in claim 75,wherein after removal of the substrate no subsequent rear surfacetexturing is required.
 77. A method for fabrication of a semiconductordevice, the semiconductor device having a plurality of epitaxial layerson a substrate, the plurality of epitaxial layers including an activeregion in which light is able to be generated, the method comprising:(a) patterning the plurality of epitaxial layers below the active regionduring the deposition of the plurality of epitaxial layers; (b) applyingat least one first ohmic contact layer to a front surface of theplurality of epitaxial layers, the first ohmic contact layer also actingas a reflector; and (c) removing the substrate.
 78. A method forfabrication of a semiconductor device, the semiconductor device having aplurality of epitaxial layers on a substrate, the plurality of epitaxiallayers including an active region in which light is able to begenerated, the method comprising: (a) applying at least one first ohmiccontact layer to a front surface of the epitaxial layer, the first ohmiccontact layer also acting as a reflector; (b) removing the substratefrom a rear surface of the epitaxial layers; (c) depositing dielectricfilms on the epitaxial layers; and (d) texturing the dielectric films.79. A semiconductor device comprising epitaxial layers, first ohmiccontact layers on a front surface of the epitaxial layers and providinga reflective surface, and a second ohmic contact layer on a rear surfaceof the epitaxial layers; the rear surface being surface textured.
 80. Asemiconductor device as claimed in claim 79, further comprising arelatively thick layer of a thermally conductive metal on the firstohmic contact layer, there being an adhesive layer on the first ohmiccontact layer between the first ohmic contact layer and the relativelythick layer.
 81. A semiconductor device as claimed in claim 80, whereinthere is a seed layer of the thermally conductive metal applied to theadhesive layer.
 82. A semiconductor device as claimed in claim 79,wherein the second ohmic contact layer is selected from the groupconsisting of: opaque, transparent, and semi-transparent.
 83. Asemiconductor device as claimed in claim 79, wherein the second ohmiclayer includes bonding pads.
 84. A semiconductor device as claimed inclaim 79, wherein the thermally conductive metal is copper and theepitaxial layers comprise multiple GaN-related epitaxial layers.
 85. Asemiconductor device as claimed in claim 79, wherein the semiconductordevice is selected from the group consisting of: a light emittingdevice, and a transistor device.
 86. A semiconductor device as claimedin claim 79, wherein the second ohmic contact layer is selected from thegroup consisting of: blank, and patterned.